| Table 1 Delivery list |
| Item | Note | Qty. |
| Basic Components | Furnace |
| 1 Unit |
| inspection certificate | Certificate of major outsourced components | 1 Set |
| Technical Documents | Instructions, technical documents of the major outsourced parts,
etc | 1 Set |
| Key Components | Heating Element | Resistance wire pre-built heating plate | 1 Set |
| Mechanical Pump | Busch DRV60 | 1 Unit |
| Molecular Pump | Zhongke Keyi FF-200 | 1 Unit |
| Vacuum Gauge + Regulator | Ruibao | 1 Set |
| Oxygen Analyzer | Nanoaonai | 1 Unit |
| Touch Screen |
| 1 Unit |
| Mass Flow Meter | Precise Measurement | 1 Unit |
| Temperature Controller | Azbil or equivalent brand | 1 Set |
| Thermocouple | Type K | 3 Pcs |
| PLC | SIEMENS or equivalent brand | 1 Unit |
| Spare Parts | SSR |
| 1 PC |
| Sealing ring | Fluororubber | 1 Piece |
Reference dimensions: 1500×1950×1750mm (W×H×D), actual dimensions
subject to the product specifications.
Environmental conditions: Temperature 0～40℃, humidity ≤80% RH, no
corrosive gases, no strong airflow disturbances.
Nitrogen conditions: Gas source pressure 0.2～0.4 MPa, purity
99.999%, gas consumption 2～6 m³/h.
Ventilation gas source conditions: Clean, dry, oil-free compressed
air, pressure 0.4～0.8 MPa.
Water supply conditions: 0.1～0.3 MPa, clean, non-corrosive, supply
flow rate 1～3 L/min.
Ventilation system: Non-contact connection to the user's exhaust
system, exhaust capacity greater than 10 m³/h.
Floor requirements: Level, no significant vibration, load-bearing
capacity >500 kg/m².
Power conditions: Capacity greater than 22 kVA, 3-phase 5-wire,
voltage 220/380 V, frequency 50 Hz. Live wires: yellow, green, red;
neutral wire: blue; ground wire: yellow-green.
Installation site: 3000×2500×3000mm (D×W×H), installation area
greater than 8 m².
