I. Core performance parameters
Temperature control
Working range: room temperature ~ 400 ° C (350 ° C for long-term stable operation)
Temperature control accuracy: ± 1C (with PID self-tuning)
Uniformity: ± 5C (350C constant temperature 1h empty furnace test)
Heating rate: ≤ 5C / min (recommended setting ≤ 3C / min to extend the life of the heating tube)
Cooling method: with the furnace cooling (350C → room temperature < 12h)
Vacuum system
Extreme vacuum: 102 pa (empty furnace, clean, room temperature)
Vacuum time: normal pressure → 102 pa ≤ 60min
Leakage rate (recommended acceptance standard): ≤ 5 × 103 pa · L / s
Climate control
Oxygen: < 50ppm (with 99.999% high purity nitrogen)
Air consumption: 2 ~ 6 m3 / h (recommended installation of flowmeter monitoring)
II. Equipment configuration instructions
Tank system
Material: SUS316L (corrosion resistant, avoid halogen pollution)
Effective size: 400 × 400 × 500 mm (W × H × D)
Loading mode: Manual loading, built-in horizontal rails and rack
Heating mode: Stainless steel heating tube + hot air circulation
Control system
Number of steps of the program: 20 steps
Temperature control number: 1 point (extendable)
Temperature measurement method: K-type thermocouple, reserved detection port
Safety Protection
Alarm protection: ultra-temperature, deadlock, low air pressure, low water pressure, electric motor negative equal sound and light alarm
Emergency measures: automatic power outage over temperature, it is recommended to add emergency nitrogen purge system
III. Installation and environmental requirements
Infrastructure
Power: ≥ 22 kVA, 3-phase 5-wire (220 / 380 V, 50 Hz)
Nitrogen: 0.2 ~ 0.4 MPa, 99.999% purity
Cold water: 0.1 ~ 0.3 MPa, clean and non-corrosive (1 ~ 3 L / min)
Compressed air: 0.4 ~ 0.8 MPa, clean and dry
Space layout
Equipment size: about 1500 × 1950 × 1750 mm (W × H × D)
Installation area: ≥ 8 m2, 800mm maintenance channel is recommended
Ground load: > 500 kg / m2, horizontal vibration free
Environmental conditions
Temperature: 0 ~ 40 ° C
Humidity: ≤ 80% RH
Ventilation: non-contact drainage system (drainage capacity ≥ 10 m3 / h)